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High-Purity Inline Chemical Chillers for Semiconductor & Industrial Applications

Applied Integrated Systems designs and manufactures high-purity chemical chillers for precise and stable temperature control of corrosive chemicals, DI water, and ultra-pure fluids. Our systems feature PFA (Teflon) wetted flow paths to maintain fluid purity and deliver reliable performance in semiconductor, pharmaceutical, and advanced industrial applications.

High-Purity Inline Chemical Chiller Technologies

AIS provides a range of high-purity chemical chiller solutions and standard chillers designed to meet the thermal management requirements of critical process environments. From recirculating chillers to high-purity inline cooling systems, each unit is engineered for stable temperature control, chemical compatibility, and long-term reliability.

Key Features of Our High-Purity Chemical Chillers

  • PFA (Teflon) wetted flow path for ultra-high purity applications

  • Stable and precise temperature control for critical processes

  • Designed for corrosive chemicals, DI water, and ultra-pure fluids

  • Energy-efficient cooling performance for continuous operation

  • Reliable operation in semiconductor and industrial environments

  • Configurable system designs to meet specific process requirements

Applications

  • Semiconductor process cooling and temperature control

  • Chemical delivery and recirculation systems

  • DI water cooling systems

  • Pharmaceutical and biotechnology processes

  • Industrial chemical processing requiring stable temperature control

Detailed specifications and performance data are available in the product brochures below.

Kool-Pure™

  • In-line Chemical Heater/Chiller for high temperature accuracy

  • Ultra-High Purity PFA Flow Path

  • Thermoelectric Tech

  • Power:  Up to 4KW

  • Voltage: 24 - 130 VAC

  • Max. Temperature: 75°C

  • Max. Pressure: 100 psi

Thermoelectric Cooling

Vapor Compression Cooling

Kool-Pure Plus™

  • In-line Chemical Heater & Chiller

  • Ultra-High Purity PFA Flow Path

  • Vapor Compression Technology

  • Power:  Up to 100KW

  • Voltage: 120 - 600 VAC

  • Max. Temperature: -5 - 85°C

  • Max. Pressure: 100 psi

Pelti-Therm™

  • Re-circulating Heater & Chiller

  • Standard Purity Flow Path

  • Thermoelectric Tech

  • Power:  Up to 2KW

  • Voltage: 208 - 230 VAC

  • Max. Temperature: -5 to 80°C

  • Max. Pressure: 100 psi

Thermoelectric Cooling

Power-Cool™

  • Re-circulating Chiller w/optional heating

  • Standard Purity Flow Path

  • Vapor Compression Technology

  • Power:  Up to 250KW

  • Voltage: 120 - 600 VAC

  • Max. Temperature: -20-98°C

  • Max. Pressure: 100 psi

Vapor Compression Cooling

Applied Integrated Systems, High Purity Process Chemical Heaters and Chillers, Quick Links, AIS Location
AIS Logo with White Letters

Applied Integrated Systems, Inc

Delivering high purity chemical heaters and chemical chillers engineered for precise temperature control of corrosive and ultra-pure fluids in semiconductor, pharmaceutical, and advanced industrial environments.

Quick Links

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Location

2010 Crow Canyon Pl., Suite 100

San Ramon, CA 94583

Telephone: 925-948-0819

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