top of page
  • Facebook
  • Twitter
  • Instagram

High-Purity Inline Chemical Heaters for Semiconductor & Industrial Applications

Applied Integrated Systems designs and manufactures high-purity inline chemical heaters for precise temperature control of corrosive chemicals, DI water, and ultra-pure fluids. Our heaters feature PFA (Teflon) wetted flow paths to ensure contamination-free performance in semiconductor, pharmaceutical, and advanced industrial applications.

High-Purity Inline Chemical Heater Technologies

AIS offers multiple heater technologies to meet specific process requirements, including resistive, infrared, and thermoelectric heating solutions. Each system is engineered for high purity applications with PFA (Teflon) wetted flow paths and precise temperature control.

Key Features of AIS Chemical Heaters

  • PFA (Teflon) wetted flow path for ultra-high purity applications

  • Precise and uniform temperature control with no hot spots

  • Designed for corrosive chemicals, DI water, and ultra-pure fluids

  • Inline configuration for seamless system integration

  • Long-term reliability in semiconductor manufacturing and industrial environments

  • Custom configurations available for specific process requirements

Applications

  • Semiconductor wet processing (etching, cleaning, stripping)

  • Chemical delivery and recirculation systems

  • DI water heating systems

  • Pharmaceutical and biotechnology processes

  • Industrial chemical processing

Detailed specifications and performance data are available in the product brochures below.

Resistive Heating

​Therma-Pure™

  • In-line Chemical Heater

  • Ultra-High Purity PFA Flow Path

  • Resistive Technology

  • Power:  Up to 30KW

  • Voltage: 120 - 480 VAC

  • Max. Temperature: 180°C

  • Max. Pressure: 100 psi

Insta-Therm™

  • In-line Chemical Heater

  • Ultra-High Purity PFA Flow Path

  • Infrared Technology

  • Power:  Up to 150KW

  • Voltage: 120 - 480 VAC

  • Max. Temperature: 180°C

  • Max. Pressure: 100 psi

Infrared Heating

Thermoelectric Heating

Kool-Pure™

  • In-line Chemical Heater and Chiller

  • Ultra-High Purity PFA Flow Path

  • Thermoelectric Technology

  • Power:  Up to 4KW

  • Voltage: 120 - 240 VAC

  • Max. Temperature: 75°C

  • Max. Pressure: 100 psi

Resistive Heating

Aqua-Therm™

  • In-line DI water Heater

  • Ultra-High Purity PFA Flow Path

  • Resistive Technology

  • Power:  Up to 250KW

  • Voltage: 120 - 600 VAC

  • Max. Temperature: 98°C

  • Max. Pressure: 100 psi

Applied Integrated Systems, High Purity Process Chemical Heaters and Chillers, Quick Links, AIS Location
AIS Logo with White Letters

Applied Integrated Systems, Inc

Delivering high purity chemical heaters and chemical chillers engineered for precise temperature control of corrosive and ultra-pure fluids in semiconductor, pharmaceutical, and advanced industrial environments.

Quick Links

​

Location

2010 Crow Canyon Pl., Suite 100

San Ramon, CA 94583

Telephone: 925-948-0819

bottom of page